抄録
The effect of the squeeze film to the characteristics of the capacitive micro accelerometers, which the authors have previously fabricated for detection of acoustic signals, has been examined using a model of equivalent circuit. The change in resonant frequency and sensitivity associated with a change of the inside pressure of the sensor have been reasonably simulated by the model. The authors have examined the optimum design of the micro accelerometer using the model, and have found that flat sensitivity up to 1 kHz, which is required to the sensor, can be achieved by changing gap length and size of the moving mass.
