多重光路型レーザ干渉計による高周波数用振動加速度校正装置の開発

抄録

This paper outlines the development of a new primary calibration system for vibration and acceleration standard extending to the frequency range up to 10 kHz at the National Metrology Institute of Japan (NMIJ). In order to achieve this purpose, two types of laser interferometer with multifold optical path (twofold and fourfold optical paths) are discussed as measurement technique for quite small dynamic displacement down to 25 nm. These laser interferometers are successfully installed into the primary calibration system for the sine-approximation method in compliance with ISO-16063-11. The primary calibration system with the laser interferometer with multifold optical path are capable of performing practical calibration within maximum expanded uncertainty of 3.5 % in a higher frequency range up to 10 kHz.