Development of MEMS Device for Electrical and Physical Characterization of Single Cell

Abstract

We introduce a novel MEMS device for various biocells measurements by singular cell level with parallel analysis and high throughput. This paper deals with the details of its fabrication, including device packaging, and the practical measurement of red blood cell using a twin microcantilever type sensor array. Based on a simple measurement of the electrical impedance of a living single red blood cell and its suspension, an important set of data, which can be used to describe living matter, could be obtained. It was confirmed that the electrical impedance between normal and abnormal red blood cells was different in magnitude and phase shift.