Miniaturized SAW Motor with 100 MHz Drive Frequency

Abstract

Utilization of 100 MHz drive frequency miniaturized a surface acoustic wave (SAW) motor down to 3x12.5x2.5 mm³. A slider fabricated with hemispheric projections enabled the 100 MHz frequency drive. Despite the diminutive size of the actuator, the miniaturized SAW motor performed up to 0.3 m/s high speed and 13 mN high output force.