IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 126, Issue 4
Displaying 1-10 of 10 articles from this issue
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Special Issue on “Microactuators leading breakthroughs”
Special Issue Paper
  • Improvement of Positioning Performance of AZARASHI (Seal) Mechanism with Three Degrees of Freedom
    Katsushi Furutani, Katsumi Kawagoe
    2006 Volume 126 Issue 4 Pages 131-136
    Published: 2006
    Released on J-STAGE: July 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.131
    JOURNAL FREE ACCESS
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    This paper deals with a reduction method of the straightness error of a small mobile device, “AZARASHI (Seal) Mechanism," with three degrees of freedom. This device consists of two controlled Electromagnets A and B connected by two Piezoelectric actuators with Electromagnet C that generates a constant friction. The friction at Electromagnets A and B are changed by on-off control. The whole device wriggles with Electromagnets C when Piezoelectric actuators extend and contract. The displacement in the experiments are corresponding with the displacement analyzed by solving the equation of motion. The off-friction force generates the moment so that the device is rotated. According to the analytical results, the driving method was improved to reduce the straightness error. In this method, both Piezoelectric actuators are driven in the same way. Then the moment was canceled out and the device was seldom rotated. Consequently, the device could move with less straightness error.
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  • Improvement of Output Power of ECF Micromotor
    Shinichi Yokota, Kiyomi Kawamura, Kenjiro Takemura, Kazuya Edamura
    2006 Volume 126 Issue 4 Pages 137-143
    Published: 2006
    Released on J-STAGE: July 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.137
    JOURNAL FREE ACCESS
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    Electro-conjugate fluid (ECF) is a kind of dielectric fluids, which produces jet-flow (ECF jet) when subjected to a high DC voltage. By using the ECF jet, a new type of micromotor with simple structure and lightweight can be realized. Up to now, we developed a disk-plate type ECF micromotor with inner diameter of 9 mm. In this study, we develope novel ECF micromotors with inner diameter of 5 mm in order to improve the output power density. First, we designed and produced the ECF micromotors with 4-layered and 8-layered disk plate rotors. Then, the performances of the motors are measured. The experimental results confirm the motor developed has a higher performance than the previous ones.
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  • Development of a Small Two Axis Spherical Motor Type Laser Tracker with Submicron Measurement Accuracy
    Tomoaki Yano, Toshiyuki Takatsuji, Sonko Osawa, Takeo Suzuki, Yoichi M ...
    2006 Volume 126 Issue 4 Pages 144-149
    Published: 2006
    Released on J-STAGE: July 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.144
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    Recently, it is in great need for measurement of the three dimensional surface form of the car and the aircraft, the path of the industrial robot and the machine tool, and so on with a high degree of accuracy. We have proposed a novel laser tracking three dimensional position measurement system which can measure the 3D position with submicron accuracy at more than 1[m] by combining the oscillating lever mechanism with the spherical motor. Before making the full system, we made the first and the second prototype spherical motor type laser tracker unit and tested them. The average measurement error of the developed laser tracker 2 is 0.45[μm] and the standard deviation is 0.54[μm], which satisfy the specifications needed for the full system.
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  • An Experimental Compound Display for Pressure and Force Presentation
    Masahiro Ohka, Keitaro Kato, Takehiro Fujiwara, Ysunaga Mitsuya
    2006 Volume 126 Issue 4 Pages 150-157
    Published: 2006
    Released on J-STAGE: July 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.150
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    The authors have developed a compound display capable of stimulating muscles and tendons of the forearms and tactile receptors in fingers to investigate the effects on the presentation of tactile-haptic reality. The system comprises a master hand having two sets of tactile display with a 4-by-6 array of stimulus pins and an articulated manipulator. To evaluate the haptic display's presentation capability, we performed two series of experiments. In Experiment A, human subjects grasped virtual pegs and they judged their diameters. In Experiment B, the human subjects tried to insert the pegs into a hole. We evaluated the presentation capability of the display on the basis of judgement precision of the peg's diameter and variation in inclination of the peg. Since diameter discrimination and insertion precision of the virtual peg were increased by tactile information, tactile-haptics presentation was effective for the peg-in-hole in the case of relatively large clearance.
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  • Temperature Dependence of Piezoelectric Properties of Sputtered Aluminum Nitride on Silicon Substrate
    Kazuhiko Kano, Kazuki Arakawa, Yukihiro Takeuchi, Morito Akiyama, Naoh ...
    2006 Volume 126 Issue 4 Pages 158-163
    Published: 2006
    Released on J-STAGE: July 01, 2006
    DOIhttps://doi.org/10.1541/ieejsmas.126.158
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    We report for the first time the temperature dependence of the piezoelectric coefficient d33 of the aluminum nitride (AlN) film measured at temperatures up to 300 °C. A highly c-axis oriented AlN film was successfully deposited on a polycrystalline silicon / silicon dioxide / silicon wafer by a reactive sputtering technique to form a piezoelectric uni-morph actuator. A scanning laser Doppler vibrometer was used to measure the picometer level displacement of the actuator at 20 kHz at different temperatures. The piezoelectric coefficient d33 has a constant value of 5 pC/N at temperatures ranging between 20 °C and 300 °C.
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Special Issue Letter
Errata
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