IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Thermal Anemometer Using a Micro-Air-Bridge Heater with Chip Scale Wind Tunnel
Shin-ichi YasakaSeishiro OhyaMasahiko MitsuhashiSatoru KanekoTakeshi ItoYouichi KannoYukiyasu AikyoShin-ichi KomuroKazuya OhbayashiMitsuteru Kimura
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2007 Volume 127 Issue 4 Pages 241-246

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Abstract
We developed a thermal anemometer using a novel sensor chip fabricated by the silicon micromachining technique. A chip scale wind tunnel on the sensor chip allowed the fluid to flow from the front to back side. Since conventional sensors using a micro-air-bridge heater were placed parallel to air flow, the heat transfer from the heater was influenced by turbulence generated from a chip edge or other micro structures. We expected that the chip scale wind tunnel bound air flow to keep regularity of heat transfer. By using the sensor chip, we produced a prototype thermal anemometer, and measured characteristics. The anemometer could measure wind velocity in the range of 0∼35m/sec. The directivity to wind direction was very symmetric at 5, 10, 15 and 20m/sec.
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© 2007 by the Institute of Electrical Engineers of Japan
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