電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
B2O3-La2O3系ガラスに適したインプリント金型材料の研究
安井 学小俣 有紀子杉本 公一金子 智平林 康男高橋 正春前田 龍太郎
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2008 年 128 巻 11 号 p. 431-434

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Reactivity between nanoimprint mold material and optical glass has been investigated by measuring the contact angle between these materials in a nitrogen atmosphere at high temperature up to 1000°C. Since the low softening temperature optical glass was chosen in this study, the thermal upper limit of the contact angle measurement was set 800°C on. As the mold materials, electrodeposits Ni-W alloy containing 40 wt% W and the glass like carbon (GC) were chose. In the case of the GC, the contact angle did not changed largely at the temperatures up to 800°C, while obvious reactant phase in the interface layer between GC and the molten glass was observed. In the case of the Ni-W alloy, the contact angle decreased with increasing the temperature while, no reactant phase was observed at the interface. This indicated that indicating the Ni-W alloy is suitable as the mold materials for the B2O3-La2O3 based optical glass.
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© 電気学会 2008
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