抄録
The model of transient response of semiconductor gas sensor under modulation heating has been constructed successfully. The model consists of the heat conduction process from heater to the sensor surface, the reaction process on the sensor surface and diffusion process near the sensor surface to supply the inflammable gas. The calculated sensor response agreed well with experimental result under step power supplying to the heater. We can predict the sensor transient response so that the model will be useful to distinguish gases and smells by using transient response of semiconductor gas sensors.
