電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
研究開発レター <第25回センサシンポジウム>
Feasibility Study of Micro-Actuator Using Electro Conducting Polymers
Junji SoneAkihisa AsamiGyosuke KimuraKatsumi Yamada
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ジャーナル フリー

2009 年 129 巻 3 号 p. 81-82

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抄録
Recently, a soft actuator was developed using an electro conducting polymer and an ionic conducting polymer. Moreover, the stereolithography that uses femto second laser was researched as a method of multi-photon sensitized polymerization. In this proposal, we confirmed the fabrication of a 3D microstructure using a electro conducting polymer with a femto second laser, and its operation as an actuator. The diameter of the actuator core was 3.5μm, and its height was 12μm.
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© 2009 by the Institute of Electrical Engineers of Japan
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