MEMS Micro-Mirror Array for Electrostatic Field Distribution Measurement System

Abstract

A micro-mirror array fabricated by MEMS process has been made for an electrostatic field distribution measurement system. Each micro-mirror is suspended by two thin torsion bars, which is made by using an SOI (Silicon on Insulator) wafer fabrication process. Deflection of each mirror by electrostatic field is measured optically by using a two dimensional optical scanner and a PSD (Position Sensitive Detector). The electrostatic field distribution measurement system was applied to a human body model.