Fabrication and Basic Characteristics of Multiaxial Tactile Sensor with 3 Cantilevers

Abstract

Tactile array sensors with three inclined micro-cantilevers embedded in elastomer, which can detect both normal and shear forces, have been designed and fabricated. The inclined cantilevers consist of multilayer of Polymer/NiCr/SiN/Si and the normal and shear forces are detected as resistance change of NiCr thin film induced by deformation of the cantilever. This tactile sensor has sensitivity linear to normal and shear forces. Moreover, this sensor can detect normal and shear force by the resistance changes of 3 cantilevers.