静電容量検出型集積化MEMS慣性センサの固有振動数設計

抄録

A capacitive microelectromechanical systems (MEMS) inertial sensor that is able to measure an acceleration and angular rate (rotation) simultaneously has been developed. Integration is the only practical approach to realizing low-cost and small-size sensors, largely because both assembling and aligning tasks for individual sensors such as for accelerometers and gyroscopes are eliminated. In this paper the developed sensor shares mechanical parts such as seismic masses and suspensions as well as electrical parts such as a capacitive-voltage conversion circuits for measuring different inertial information such as acceleration and angular rate. We report the design scheme for the natural frequencies of the inertial sensor element with which the mechanical parts and detection circuits are shared for a specific application such as for a vehicle electronic stability control system. This design scheme can also be applied for a device that contains peripheral circuits on the sensor element as well.