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Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles
2011 年 131 巻 7 号 p. 270-271
詳細
2011 年 131 巻 7 号 p. 270-271
A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.
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