抄録
The FePd/PZT/FePd and the FePd/PZT stacked-layer magnetic sensors were studied. A magnetic field was applied to the longitudinal direction of the sensor to cause a longitudinal stress magnetostrictively, which produces a piezoelectric output voltage in the PZT layer. The prototype sensors are 15 mm long and 6 mm wide and the thicknesses of the FePd layer and PZT layer are 10 µm and 330 µm, respectively. The theoretical sensitivities of the FePd/PZT/FePd sensor and the FePd/PZT sensor using a simple cantilever model were calculated to be 0.29 mV/A/m and 0.15 mV/A/m, respectively. The measured sensitivities agreed reasonably with the calculated ones.
