抄録
A new z-axis capacitive accelerometer for the airbag system has been developed. This accelerometer has a unique sensing mechanism by which the displacement of an inertial mass caused by acceleration in the z-axis direction is converted to the rotational displacement of a pair of detection plates. Significant immunity of the sensor output to extremely high-magnitude acceleration with high frequency has been attained by the squeeze damping effect and its variable resonant frequency structure. Accurate collision velocity detection without mechanical contact between movable electrodes and fixed electrodes is demonstrated by the high frequency impact tests.
