量子井戸型InAsホール素子による高感度リニアハイブリッドホールIC

抄録

By electrically connecting and placing an InAs deep quantum well (DQW) Hall element as a magnetic sensor chip and a Si IC linear amplifier in a small plastic package, a very small sized InAs DQW linear hybrid Hall IC (InAs DQW LHHIC) with a high magnetic field sensitivity was developed. The output voltage of the hybrid Hall IC showed a very small temperature coefficient of 0.02%/°C and the response time was very small at less than 3µsec. By using this InAs DQW LHHIC, practical current sensors having high sensitivity, high accuracy, and temperature stability were developed.