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電気学会論文誌E(センサ・マイクロマシン部門誌)
Vol. 133 (2013) No. 2 P 54-55

記事言語:

http://doi.org/10.1541/ieejsmas.133.54

研究開発レター

In this paper, we report a MEMS Fabry-Perot tunable filter with Dual Electrodes Electrostatic Actuator (DEEA) which improves the resolution of the mirror gap positioning. This device improved positioning resolution by changing two actuators of the DEEA and achieved the higher resolution less than 0.1nm by using 12bit driver circuit.

Copyright © 2013 電気学会

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