2電極静電アクチュエータを用いた高駆動分解能MEMSファブリ・ペローチューナブルフィルタ

抄録

In this paper, we report a MEMS Fabry-Perot tunable filter with Dual Electrodes Electrostatic Actuator (DEEA) which improves the resolution of the mirror gap positioning. This device improved positioning resolution by changing two actuators of the DEEA and achieved the higher resolution less than 0.1nm by using 12bit driver circuit.