特集解説
フィジカルセンサの基礎と発展
2014 年 134 巻 7 号 p. 169-174
詳細
2014 年 134 巻 7 号 p. 169-174
The physical sensors have been playing an essential role in realizing various electronic control systems. This paper describes the basics of these physical sensors including their classification, operation principals and the relevant MEMS sensors, followed by the history of their developments.
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