A novel method has been proposed to detect proximity and tactile information using a single MEMS sensor. Tactile information is obtained from DC resistance change of NiCr strain gauge film. In contrast, proximity information is obtained from AC impedance change, which is caused by photo-absorption of Si wafer irradiated by a neighboring LED. Therefore, selection of the information to be acquired is performed by switching the DC and AC measurement system. Experimental results show almost linear tactile output to indentation of 0 to 0.5mm and non-linear proximity output to distance of 0 to 50mm, respectively. Moreover, the sensor is able to acquire rough shape of a toroidal object by proximity measurement.
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