Nonlinear Coupled Silicon Resonator with Binary Vibration

Abstract

In this paper, we report on the behavior of a nonlinear coupled thin Si resonator. Nonlinear resonators exhibit stochastic resonance (SR) response by applying a noise, in which the resonator shows two vibration states. On the other hand, a thin Si has strong nonlinearity and causes mechanical coupling between resonators. The SR responses of the coupled resonators are investigated, and it is found that SR is affected by each other. Moreover, the resonant frequency can be shifted and the nonlinearity of each resonator can be switched by mechanical interaction via a thin Si plate. In addition, the phase of the stochastic resonance is also related to the vibration amplitude and the nonlinearity. It is shown that this coupled resonator functions as a logic circuit.