Twin-probe Atomic Force Microscopy with Optical Beam Deflection using Vertically Incident Lasers by Two Beam Splitter

Abstract

We developed a twin-probe atomic force micrsocpy (AFM) system using Si-cantilever probes. The system utilizes the optical beam deflection method for detecting the deflection of each cantilever-probe mounted on each tube-type actuator. The cantilever-probes mounted on each actuator are realized independent control of the probe positions, which are attached to manual-sliders. Each displacement sensing sensitivity of two cantilever-probes achieves 90fm/√Hz or less. We succeeded the simultaneous observation of the topographic image under the state which they approached mutually with 40µm.