IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Letter
An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors
Daisuke YamaneToshifumi KonishiTakaaki MatsushimaShota KameiKazuya MasuKatsuyuki Machida
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2015 Volume 135 Issue 4 Pages 142-143

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Abstract
This paper reports a novel method of evaluating the actual Bn (Brownian Noise) in capacitive sensors for high sensitivity. By analyzing the frequency response of the electrical impedance, the proposed method provides an advantage of evaluating the Bn associated with the mechanical characteristics of capacitive sensors even when the sensors are packaged. We employed the method to measure the quality factors of the MEMS capacitive sensors, and evaluated the value of the Bn and the damping coefficients. The experimental results show a good agreement with the conventionally-known physical parameters.
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© 2015 by the Institute of Electrical Engineers of Japan
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