Tactile Sensor Using Micro-cantilever with BiFeO₃ Piezoelectric Film

Abstract

We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO₃ thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO₃ can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.