IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 135, Issue 5
Displaying 1-14 of 14 articles from this issue
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Special Issue on “Selected papers in The Technical Meetings on Sensors and Micromachines 2014”
Preface
Special Issue Paper
  • Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films
    Tsunehisa Tanaka, Shuichi Murakami, Mayumi Uno, Kaoru Yamashita
    2015 Volume 135 Issue 5 Pages 145-151
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.145
    JOURNAL FREE ACCESS
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    MEMS ultrasonic sensor was fabricated using the poly(vinylidene fluoride-trifluoroethylene)[P(VDF/TrFE)] copolymer thin films having multilayer diaphragm structures. It was shown that the P(VDF/TrFE) thin film on MEMS ultrasonic sensor exhibit a remanent polarization Pr of 72 mC/m2 and a coercive field Ec of 59 MV/m. The resonant frequency, Q-value and sensitivity of the MEMS ultrasonic sensors are estimated to be on the order of 178 kHz, 24 and 45 µV/Pa, respectively. The P(VDF/TrFE) thin film was shown to be useful for piezoelectric material of MEMS ultrasonic sensor.
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  • Development of a Plasma Separation System for a Portable Blood Test Device
    Chiaki Kuroda, Yoshimichi Ohki, Hiroki Ashiba, Makoto Fujimaki, Koichi ...
    2015 Volume 135 Issue 5 Pages 152-157
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.152
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    Aiming at developing a portable and speedy blood test device, a microfluidic system is designed and developed. Blood is injected into a hole with a diameter of 3.0 mm and a height of 3.0 mm. When the blood sample is transported from the bottom to the top of the hole, blood cells sediment at the bottom and plasma is separated at the upper side. Using this system, approximately 1 µL pure plasma can be obtained when blood is injected at a flow rate of 0.70 µL/min for 15 minutes. Moreover, by retaining the blood in the hole for seven minutes, pure plasma can be obtained 11 minutes later.
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  • Tactile Sensor Using Micro-cantilever with BiFeO3 Piezoelectric Film
    Masato Mihara, Akito Nozawa, Takashi Abe, Masanori Okuyama, Haruo Noma ...
    2015 Volume 135 Issue 5 Pages 158-164
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.158
    JOURNAL FREE ACCESS
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    We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO3 thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO3 can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.
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  • High Surface Accuracy Resonant Varifocal Mirror
    Kenta Nakazawa, Takashi Sasaki, Kazuhiro Hane
    2015 Volume 135 Issue 5 Pages 165-170
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.165
    JOURNAL FREE ACCESS
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    Electrostatically actuated resonant varifocal mirrors were developed by bonding a silicon-on-insulator wafer and a glass wafer. Three different types of supporting fringes for the mirrors were tested to study the mirror's surface profiles by using the optical interference images. The surface profile deviation from the ideal parabolic shape was supported to 70 nm or less when the mirror's supporting fringe was made to be mechanically compliant.
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  • Development of Nano-porous SiO2 Electret with High Thermal Resistance and Its Application to Vibration Energy Harvester
    Masato Suzuki, Tomokazu Takahashi, Seiji Aoyagi
    2015 Volume 135 Issue 5 Pages 171-177
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.171
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    This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous silicon dioxide (SiO2). Electrical charge density in the nano-porous SiO2 is higher than that in a normal (i.e., nonporous) SiO2 because there are many voids in the nano-porous SiO2 and the interface between void and SiO2 traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO2 is lower than that of normal SiO2. Since SiO2 is thermally stable, thermal stability of the electrical charge in nano-porous SiO2 electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO2 electret is also larger than that using the normal SiO2 or polymer electret.
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  • Low Power ASIC for Monitoring Human Motion Activity
    Fumihiro Washino, Yuki Matsumoto, Tomoya Tanaka, Koji Sonoda, Kensuke ...
    2015 Volume 135 Issue 5 Pages 178-183
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.178
    JOURNAL FREE ACCESS
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    We designed and evaluated low power ASIC (Application Specific Integrated Circuits) for the human activity and health monitoring systems to reduce the total power consumption. The ASIC extracts walking and running steps and holds the maximum and minimum values from raw data of acceleration sensor. To realize ultra-low power consumption, the algorithm is designed to reduce the amount of the data calculation for pedometer. Power consumption was reduced to 15% from previous prototype system by using the designed ASIC.
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  • Thermal Radiation Control by Resonant Mode in Diffraction Gratings Coupled to Surface Wave
    —Optical Analysis and Fabrication Process—
    Kota Ito, Takayuki Matsui, Hideo Iizuka, Hiroshi Toshiyoshi
    2015 Volume 135 Issue 5 Pages 184-190
    Published: May 01, 2015
    Released on J-STAGE: May 01, 2015
    DOIhttps://doi.org/10.1541/ieejsmas.135.184
    JOURNAL FREE ACCESS
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    Subwavelength structures are attracting scientific interests as a novel mean of thermal radiation control. In our previous work, we proposed emissivity control through the coupling between the surface polariton and the guided mode in resonant gratings. In this paper, we analytically investigate the emissivity of the thermal emitter that consists of slightly doped silicon gratings and a heavily doped silicon layer. The modal analysis is used to evaluate the active modulation capability. Fabrication process to manufacture the device and challenges encountered on the fabrication are discussed. The actuation of the grating height is also simulated.
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