ナノポーラスSiO₂を用いた高耐熱エレクトレットの開発および振動発電デバイスへの応用

抄録

This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous silicon dioxide (SiO₂). Electrical charge density in the nano-porous SiO₂ is higher than that in a normal (i.e., nonporous) SiO₂ because there are many voids in the nano-porous SiO₂ and the interface between void and SiO₂ traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO₂ is lower than that of normal SiO_2. Since SiO₂ is thermally stable, thermal stability of the electrical charge in nano-porous SiO₂ electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO₂ electret is also larger than that using the normal SiO₂ or polymer electret.