抄録
In this research, we fabricated a MEMS (Micro Electro Mechanical Systems) heart sound sensor (phonocardiogram sensor). The sensor is based on piezo-resistive silicon cantilever and it detects the skin vibration caused by heartbeat. We made a small water chamber between the cantilever and the skin, so that good impedance matching between the skin and the cantilever was achieved. We measured the heart sound by the MEMS heart sound sensor and the commercial electronic stethoscope simultaneously and comparing the outputs. As a result, we confirmed that our MEMS heart sound sensor can detect the heartbeat as same as electronic stethoscope.
