Electroplating Technology of Platinum Catalyst for MEMS Hydrogen Gas Sensor

Abstract

In this paper, we discuss electroplating method to deposit platinum catalyst called platinum black on the both-side of sensors on a quartz wafer to improve sensitivity of hydrogen sensors using quartz resonators. By increasing current density until the limiting current density, the platinum black films were deposited on the electrodes of sensors in a stable. Under the constant current condition, controllability of film thickness of platinum black by time was confirmed. As a result of comparison to the sputtered platinum thin film catalyst, the platinum black catalyst showed higher catalytic activity.