電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
微量液体に対応した水晶発振回路式液体濃度センサの開発
柳田 祐太須佐 翼寒川 雅之安部 隆
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2016 年 136 巻 7 号 p. 319-322

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In this paper, the liquid concentration sensor using crystal oscillator circuit which is available for measuring microdroplet is reported. We optimized the design of the sensing capacitor (SC) for sensing microdroplet. An electric-field-concentrated SC was used for measuring the liquid. The SC incorporated into the quartz oscillator has high-sensitivity because of the high stable crystal oscillator circuit. The SC is embedded in a silicone rubber. A spatially confined electric field is generated over the rubber. Therefore, the frequency of the oscillator changes by the contact with a liquid to the rubber. Moreover, the change less affected by a quantity of liquid. Because the frequency changes relate to the electrical characteristics of the liquid, the concentration of the liquid can be measured by the sensor. This sensor is expected to be applied to factory automation.
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