2016 年 136 巻 9 号 p. 404-407
We develop 2D asymmetric micromirrors with high vibration transmissibility for a glass-like retinal display according to the National Television System Committee standard via dynamic analysis using a single external piezoelectric ceramic vibrating element. The high-speed axis can attain a relatively much larger rotation angle by the addition of translational motion that is equal to the resonant frequency directly transmitted by the low-speed axis of a rotation oscillation system. Moreover, we fabricate 2D asymmetric silicon micromirrors using a silicon-on-insulator microelectromechanical system process and obtain 70.5-Hz and 19510-Hz resonant frequencies along the low- and high-speed axes, respectively. Furthermore, we measure the scanning range on a Lissajous pattern using a scale; the scanning angles are 12.4° along the low-speed axis and 23.7° along the high-speed axis.
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