超音波トランスデューサを指向したPb(Zr,Ti)O₃薄膜の多層積層成膜

抄録

In this study, we have fabricated membranes which are composed of 2-layers and 4-layers Pb(Zr,Ti)O₃ thin films with internal electrodes by using sputtering depositions. Electrical and driving characteristics as ultrasonic transducers of these membranes are evaluated. By increasing number of layers, the static displacement is reduced. However, for the multi-layered membrane, the dynamic displacement became large because of the large mechanical Q factor in resonant vibration. The emitted sound pressure level and characteristics of the ultrasonic transducer are estimated.