IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Study on Microfabrication of Polytetrafluoethylene using X-ray-induced Pyrochemical Anisotropic Etching
Akinobu YamaguchiHideki KidoMasaya TakeuchiYuichi Utsumi
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2017 Volume 137 Issue 12 Pages 417-421

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Abstract

We demonstrated microfabrication of polytetrafluoethylene (PTFE) using X-ray-induced pyrochemical anisotropic etching process. We found the scission of PTFE main polymer chain was induced by X-ray irradiation. The decrease of fragment length enabled pyrochemical etching because of decreasing the desorption temperature of scission fragment. Here, we can diminish the distortion of fabricated PTFE fine pattern in a large area using the pyrochemical anisotropic etching process. We also found the thermal exchange process and vapor pressure through a He gas can provide a clue to achieve the higher precision fabrication of PTFE.

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© 2017 by the Institute of Electrical Engineers of Japan
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