Study on Microfabrication of Polytetrafluoethylene using X-ray-induced Pyrochemical Anisotropic Etching

Abstract

We demonstrated microfabrication of polytetrafluoethylene (PTFE) using X-ray-induced pyrochemical anisotropic etching process. We found the scission of PTFE main polymer chain was induced by X-ray irradiation. The decrease of fragment length enabled pyrochemical etching because of decreasing the desorption temperature of scission fragment. Here, we can diminish the distortion of fabricated PTFE fine pattern in a large area using the pyrochemical anisotropic etching process. We also found the thermal exchange process and vapor pressure through a He gas can provide a clue to achieve the higher precision fabrication of PTFE.