Vacuum Packaged Micro-Cantilever with a Magnetic Particle

抄録

A Si cantilever with a magnet particle is packaged in vacuum by a direct metal (Al) bonding at 370°C. The surface of Al metal layers is coated by a thin tin (Sn) layer subsequently as an anti-oxidation layer. The packaged pressure of ∼150 Pa is estimated by the Q factors of the packaged cantilever. The bonding process with a passivation layer is a good candidate for a vacuum packaging. By packaging in high vacuum, the cantilever with a magnet particle is useful to measure the magnetic forces under ambient atmosphere.