1つの圧電ムーニー型アクチュエータを用いた2軸共振マイクロステージ

抄録

This paper reports a 2-axis in-plane resonator driven by a single piezoelectric actuator for a speckle dissolution device used in a laser-type projector. A PZT (lead zirconate titanate) unimorph actuator combined with a Moonie type displacement amplifier and 2-axis resonance structure was used to obtain large displacement. Both axes have different resonance frequencies (387.76 Hz and 323.34 Hz) and thus can be independently controlled by the single resonator with these frequencies superposed. The maximum displacement as high as 50 µm for both x- and y- directions was obtained. The proposed driving method can reduce the device size to about a half of the previously reported device with 2 actuators.