Pd系金属ガラスを用いた高速応答・低消費電力容量型MEMS水素センサに関するレビュー

抄録

This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.