The development of optical motor using light radiation pressure as a power source of MEMS is reported in this paper. The light radiation pressure is a force generated by changing the momentum of light. This force has recently been applied to the industry as laser trapping technology and so on. The applicability in MEMS for the purpose of more actively using light radiation pressure is discussed by developing a novel driving source using a micro-rotor. The torque that can be produced from one rotor using the light radiation pressure is investigated under the dynamics of the optical motor by using experimental and simulation results. It is confirmed that the torque produced by light radiation pressure can drive a micro-rotor. A method of improving rotation speed is proposed. In addition, the promotion of the use of 3D printers in the MEMS field is performed.
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