慣性装置用MEMSジャイロの高精度化

抄録

Recently, self-driving cars, small spacecraft, and unmanned aerial vehicles have been widely developed, which requires small size and high performance of IMUs. We have developed the high performance MEMS gyroscope for small size IMUs. This paper described experimental results performed to improve the performance of MEMS gyroscope. By means of mode-matched and bias corrected operations named MPC correction, angle random walk of 0.0069 deg/√h, bias instability of 0.027 deg/h and rate ramp of 0.051 deg/h/h have been achieved.