Sputter-Deposited pH-Sensitive TiO₂ Electrodes for Lactate Sensing Applications

抄録

This paper reports on pH-sensitive thin films of sputter-deposited TiO₂ on indium tin oxide electrodes for biosensor applications. The composition and crystallographic properties of the TiO₂ thin films were controlled by varying the substrate temperature and total pressure used for sputtering. The pH sensitivity and potential drift of TiO₂ thin films with different ratios of anatase to rutile phases were compared. It was found that the TiO₂ films with a predominant rutile phase exhibited low drift characteristics and those with a predominant anatase phase exhibited high sensitivity and lower hysteresis. Furthermore, lactate sensing using lactate dehydrogenase immobilized on TiO₂ thin films was demonstrated.