A Cr-N alloy thin film shows a gauge factor of about 10 and a temperature coefficient of resistivity of about zero, which is expected as a new strain gauge material in the next generation. In this study, a transverse sensitivity of the Cr-N thin films and their force sensor application has been investigated. The author has found out that the films showed almost the same large sensitivity as their axial or longitudinal sensitivity when they were arranged in the direction perpendicular to the strain, and utilization of the large transverse sensitivity made possible high positional resolution on several types of physical sensors.
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