IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Special Issue Paper
Performance Improvement of Filter-Free Fluorescence Sensor in Near-Ultraviolet Region Aiming for Biosensing Application
Toshihiko NodaTakuya TeshimaYong-Joon ChoiTakeshi HizawaKazuhiro TakahashiHiromu IshiiKazuaki Sawada
Author information

2021 Volume 141 Issue 3 Pages 77-82


Detection performance of filter-free fluorescence sensors in the near-ultraviolet region has improved in this study. Thinner polycrystalline-Si film and indium tin oxide film were introduced as materials of photogate which required high transparency for sensitive measurement. Optical property of the photogate material was evaluated. Filter-free fluorescence sensors which have photogates with high optical transmittance were fabricated based on standard CMOS process. As results of a demonstration which emulates separate detection of excitation light and fluorescence by the fabricated filter-free sensors, detection performance in the near-ultraviolet region has improved a hundredfold compared to a previous sensor.

Content from these authors
© 2021 by the Institute of Electrical Engineers of Japan
Previous article Next article