Application for Micro/Nano Devices using Shape Memory Alloys

Abstract

The shape memory alloys (SMAs) are known to exhibit shape memory effect and super elasticity. Thus far, micro electro mechanical systems (MEMS) devices and micro actuator using shape memory effect were developed. Recently, the super elasticity and electrocaloric effect are attracted, some microdevices using those effect have already been reported. In this review, the recent progress in the MEMS field of the SMAs was described.