電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
Fabrication and Evaluation of Thin Gaps for Direct Electrification
Jian LuLan ZhangLars M. AnderssonHiroshi Goto
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2023 年 143 巻 8 号 p. 225-230

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Direct electrification from low-grade heat is becoming a research focus since those devices are simpler and less bulky in design and package. In our previous studies, we demonstrated a continuous current flow by filling a nanofluids consisting of dodecanethiol coated Au nanoparticles of 3-5 nm in diameter into an inter-electrode gap. Experiments showed that the gap thickness influences the performance of the device and theoretical analysis can relate this to interactions between the nanoparticles and strength variations of the electrical field. In this paper, we report on our efforts on design, fabrication, and evaluation of two types of gaps between metal electrodes of different work functions for the investigation of device performances as well as the operational mechanism. The merits, achievements, as well as process compatibilities of each design will be presented and discussed. The efforts and the results of this work may offer practice applicable nanomanufacturing approaches to fabricating submicron gaps for many other potential applications as well.

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© 2023 by the Institute of Electrical Engineers of Japan
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