電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
MICROMACHINE DESIGN
An Important Goal
Stephen D. Senturia
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ジャーナル フリー

1996 年 116 巻 3 号 p. 83-84

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抄録
Technologies for creating a variety of microsensors, microactuators, and micromachines continue to be developed at a rapid rate. However, the capability for engineers to design these devices has been hampered by inadequate and inappropriate design tools. This paper identifies some of the critical issues facing the field, and presents a vision for the future.
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© The Institute of Electrical Engineers of Japan
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