IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
History of Silicon Accelerometers
Kenichiro Suzuki, Hiroshi Tanigawa
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Volume 116 (1996) Issue 7 Pages 252-255

DOI https://doi.org/10.1541/ieejsmas.116.252
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