1996 年 116 巻 7 号 p. 305-306
The diaphragm release technique presented here contributes to improve the processing yield of suspended microstructures. We believe that it extends the range of micromachining application because it is used to structural materials other than polysilicon, and because it is compatible with existing bulk micromachining processes.
J-STAGEがリニューアルされました! https://www.jstage.jst.go.jp/browse/-char/ja/