256×256 Uncooled Microbolometer Focal Plane Array

Abstract

Improvement in sensitivity performance of uncooled infrared sensor and increase in pixel numbers of the sensor have been accelerated. It is the first time in Japan that the uncooled camera is realized, which employs 256 ×256 uncooled bolometer sensor elements. Vanadium Oxide material is selected for the uncooled bolometer sensor whose element size is 50μm×50μm and formed on the diaphragm bridge structure.
As a result, it has a NETD of 0.2K for an f/1.0 lens at 30 frames per second.