Development of a Heat Resistant Acoustic Emission Sensor and it's Calibration

Abstract

A heat resistant capacitive sensor was developed to study the fracture dynamics of metallic materials at elevated temperatures by acoustic emission (AE) source inversion analysis. An amorphous alumina film of 3μm thickness was deposited on the stainless sensor core by an electron cyclotron resonance infrared laser physical vapor deposition (ECR-LPVD). Calibration according to the modified surface impulse deconvolution method revealed that the sensor measured the out-of-plane displacement of hot medium up to 873K with a sensitivity of 10⁷V/m.