IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
For the Special Issue on MEMS Technology
Kazuo Sato
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1997 Volume 117 Issue 8 Pages 395-398

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© The Institute of Electrical Engineers of Japan
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