MEMS Development in a Past Decade and its Future Prospects

抄録

A history of microelectromechanical system(MEMS) research and development from 1987 is reviewed Major achievements in MEMS research are listed in the time sequence. The achievements include microacuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology involved Future prospects of MEMS in contributing the 21th Century society are expected in three areas such as (1) wider distribution of and easier access to information, (2) making human activities more compatible with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are also discussed.