New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure

IEEJ Transactions on Sensors and Micromachines

Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939

New Molding Technique Using Ultra-fine Particles for Realization of Three Dimensional Micro Structure

Jun AKEDO, Masaaki ICHIKI, Kaoru KIKUCHI, Ryutaro MAEDA

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Keywords: Jet Molding, Excimer Laser Ablation, Micro fabrication, mask-deposition, PZT

JOURNAL FREE ACCESS

1997 Volume 117 Issue 8 Pages 432-433

DOI https://doi.org/10.1541/ieejsmas.117.432

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