Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

Abstract

A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis' force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.